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  • 高純金屬純度控制及提純技術

    由于金屬材料中的雜質會影響半導體芯片等下游產品的導電性能,因此,濺射靶材對金屬材料的純度提出了相當高的要求。公司通過自主研發和合作研發,已經具備生產高純度的濺射..

    更多 2015-02-05

  • 晶粒晶向控制技術

    晶粒的大小、排列方向直接決定了濺射成膜的均勻性和濺射速度,影響下游產品的品質和性能,因此,晶粒晶向的控制是濺射靶材生產過程中的核心技術。公司擁有金屬材料塑性變形..

    更多 2015-02-05

  • 異種金屬大面積焊接技術

    焊接技術是將靶坯與背板牢固地焊接在一起的技術,公司已經掌握了鋁、鈦、鉭、銅等高純金屬靶坯與背板之間的電子束焊接、擴散焊接、釬焊等技術,產品平均焊接結合率達99%..

    更多 2015-02-05

  • 金屬的精密加工及特殊處理技術

    下游客戶用于靶材濺射的機臺十分精密,對濺射靶材的尺寸要求很高,較小的偏差會影響濺射反應過程和濺射產品的性能,公司擁有一批加工中心、數控車床等大型精密加工設備,能..

    更多 2015-02-05

  • 靶材的清洗包裝技術

    下游客戶的生產環境、濺射反應機臺腔體對濺射靶材的潔凈程度要求很高,公司運用自主設計的靶材全自動清洗機進行反復的產品清洗,在真空環境下使產品干燥,用于生產半導體芯..

    更多 2015-02-05

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